Silicon self - assembled nanodots fabricated using a radio - frequency magnetron sputtering method
Silicon nanodot is a promising nanostructured material for future single-electron devices in nanoelectronic system. The self-assembly growth of silicon nanodots on sapphire substrate was investigated, with highlights on the very early stage of nucleation and the growth process. The scope of study co...
Saved in:
| 主要作者: | |
|---|---|
| 格式: | Thesis |
| 語言: | English |
| 出版: |
2008
|
| 主題: | |
| 在線閱讀: | http://eprints.utm.my/id/eprint/91893/1/LimQiaoJieMFS2008.pdf |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|