Silicon self - assembled nanodots fabricated using a radio - frequency magnetron sputtering method
Silicon nanodot is a promising nanostructured material for future single-electron devices in nanoelectronic system. The self-assembly growth of silicon nanodots on sapphire substrate was investigated, with highlights on the very early stage of nucleation and the growth process. The scope of study co...
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| 格式: | Thesis |
| 语言: | English |
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2008
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| 在线阅读: | http://eprints.utm.my/id/eprint/91893/1/LimQiaoJieMFS2008.pdf |
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