Silicon self - assembled nanodots fabricated using a radio - frequency magnetron sputtering method
Silicon nanodot is a promising nanostructured material for future single-electron devices in nanoelectronic system. The self-assembly growth of silicon nanodots on sapphire substrate was investigated, with highlights on the very early stage of nucleation and the growth process. The scope of study co...
محفوظ في:
المؤلف الرئيسي: | Lim, Qiao Jie |
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التنسيق: | أطروحة |
اللغة: | English |
منشور في: |
2008
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الموضوعات: | |
الوصول للمادة أونلاين: | http://eprints.utm.my/id/eprint/91893/1/LimQiaoJieMFS2008.pdf |
الوسوم: |
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مواد مشابهة
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Silicon self-assembled nanodots fabricated using a radio-frequency magnetron sputtering method
بواسطة: Lim, Qiao Jie
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