The effects of annealing on microstructural changes for aluminium nitride epitaxial grown on sapphire by transmission electron microscopy
The performance of semiconductor devices depends strongly upon the microstructure of the materials. Therefore the microstructural control is intrinsically important for fabrication of high performance devices. In this research, the microstructures have been analysed in detail and the mechanisms of m...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
2017
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/92232/1/JesbainsKaurPMJIIT2017.pdf.pdf |
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