Hot-wire chemical vapour deposition of silicon carbide thin films from pure silane and methane gases /

Hot-wire chemical vapour deposition of silicon carbide thin films from pure silane and methane gases /

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书目详细资料
主要作者:	Tehrani, Fatemeh Shariatmadar (Author)
格式:	Thesis 图书
语言:	English
出版:	2013.
主题:	Silicon carbide. Silicon carbide > Electric properties. Silicon-carbide thin films. Chemical vapor deposition.
在线阅读:	http://studentsrepo.um.edu.my/id/eprint/5858
标签:	添加标签没有标签, 成为第一个标记此记录!

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