Electron beam testing of integrated circuits using a modified scanning electron microscope /
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Main Author: | |
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Format: | Thesis Book |
Language: | English |
Published: |
1990.
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LEADER | 00848cam a2200241 a 4500 | ||
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001 | u151242 | ||
003 | SIRSI | ||
008 | 920402s1990 si v 00 1 eng m | ||
035 | |a AAR-8346 | ||
040 | |a UMM | ||
090 | |a TK7878.6 |b Sim | ||
100 | 1 | 0 | |a Sim, Kian Sin. |
245 | 1 | 0 | |a Electron beam testing of integrated circuits using a modified scanning electron microscope / |c by Sim Kian Sin. |
260 | |c 1990. | ||
300 | |a xvii, 156 leaves : |b ill. ; |c 30 cm. | ||
500 | |a Photocopy. | ||
502 | |a Dissertation (M.Eng.) -- National University of Singapore, 1990. | ||
504 | |a Bibliography: leaves 148-156. | ||
650 | 0 | |a Probes (Electronic instruments) | |
650 | 0 | |a Integrated circuits |x Very large scale integration |x Testing. | |
948 | |a 02/04/1992 |b 04/09/2002 | ||
596 | |a 1 | ||
999 | |a TK7878.6 SIM |w LC |c 1 |i A011065215 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 15/4/1992 |