Effects of annealing on the structural properties of R.F. sputtered amorphous silicon carbide films /

Effects of annealing on the structural properties of R.F. sputtered amorphous silicon carbide films /

محفوظ في:

التفاصيل البيبلوغرافية
المؤلف الرئيسي:	Ong, Tiong Yew
التنسيق:	أطروحة كتاب
اللغة:	English
منشور في:	1998.
الموضوعات:	Silicon-carbide thin films > Effects of rapid thermal processing on Semiconductors > Heat treatment
الوسوم:	إضافة وسم لا توجد وسوم, كن أول من يضع وسما على هذه التسجيلة!

مواد مشابهة

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