Time & temperature optimization for iron-boron pair (Fe-B) dissociation in silicon wafers by surface photovoltage (SPV) method /

Time & temperature optimization for iron-boron pair (Fe-B) dissociation in silicon wafers by surface photovoltage (SPV) method /

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書目詳細資料
主要作者:	Phang, Siew Wei
格式:	Thesis 圖書
語言:	English
出版:	2006.
主題:	Silicon > Heat treatment. Iron > Heating.
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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