PZT driven silicon XY microstage for multiprobe data storage /

PZT driven silicon XY microstage for multiprobe data storage /

Saved in:
Bibliographic Details
Main Author: Mohd Faizul Mohd Sabri
Format: Thesis Book
Language:English
Published: 2009.
Subjects:
Piezoelectric devices > Materials.
Nanotechnology > Materials.
Microactuators > Materials.
Electromechanical devices.
Microelectronics.
Tags: Add Tag
No Tags, Be the first to tag this record!

Similar Items