PZT driven silicon XY microstage for multiprobe data storage /

PZT driven silicon XY microstage for multiprobe data storage /

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Bibliographic Details
Main Author: Mohd Faizul Mohd Sabri
Format: Thesis Book
Language:English
Published: 2009.
Subjects:
Piezoelectric devices > Materials.
Nanotechnology > Materials.
Microactuators > Materials.
Electromechanical devices.
Microelectronics.
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Description
Item Description:Cover title.
Physical Description:v, 207 p. : ill. ; 30 cm.
Bibliography:Includes bibliographical references.

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