PZT driven silicon XY microstage for multiprobe data storage /

PZT driven silicon XY microstage for multiprobe data storage /

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書目詳細資料
主要作者:	Mohd Faizul Mohd Sabri
格式:	Thesis 圖書
語言:	English
出版:	2009.
主題:	Piezoelectric devices > Materials. Nanotechnology > Materials. Microactuators > Materials. Electromechanical devices. Microelectronics.
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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