Hot-wire plasma enhanced chemical vapour deposition system for preparation of silicon carbide thin films /
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主要作者: | Aniszawati Azis |
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格式: | Thesis 图书 |
语言: | English |
出版: |
2012.
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在线阅读: | http://studentsrepo.um.edu.my/id/eprint/3841 |
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