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Faidz Abd Rahman,
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Faidz Abd Rahman,
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Direct-current plasma glow discharged hydrogenated SiNx alloys : deposition and physical studies /
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Faidz
Abd
.
Rahman
Published 1996
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Fibre Lens : Design, Analysis And Fabrication
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Faidz
Abd
Rahman
Published 2002
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Related Subjects
Plasma-enhanced chemical vapor deposition
Silicon alloys
Thin films
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