Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films

Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films

Ruthenium (Ru) is one of the noble air-stable transition metals, which has excellent thermal chemical stability, low electrical resistivity, and relatively high work function near the valence band edge of Si. Recently, Ru has been introduced into the semiconductor industries as a result of the inter...

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主要作者:	Lee , Wai Keat
格式:	Thesis
出版:	2010
主题:	TA Engineering (General) Civil engineering (General)
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