Structural and optical properties of diamond like carbon films using direct current plasma enhanced chemical vapor deposition
The amorphous diamond like carbon (a - DLC) thin films were deposited in 3 hours on glass substrates at the vacuum pressure, 8.0 x 10-2 Torr ; deposition pressure, 4.0 x 10-1 Torr and deposition temperatures, 300 – 500 °C by using direct current plasma enhanced chemical vapour deposition (DC - PECVD...
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| 格式: | Thesis |
| 语言: | English |
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2015
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| 在线阅读: | http://eprints.utm.my/id/eprint/81448/1/OngWaiKitMFS2015.pdf |
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