The effects of annealing on microstructural changes for aluminium nitride epitaxial grown on sapphire by transmission electron microscopy

The effects of annealing on microstructural changes for aluminium nitride epitaxial grown on sapphire by transmission electron microscopy

The performance of semiconductor devices depends strongly upon the microstructure of the materials. Therefore the microstructural control is intrinsically important for fabrication of high performance devices. In this research, the microstructures have been analysed in detail and the mechanisms of m...

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书目详细资料
主要作者:	Kaur, Jesbains
格式:	Thesis
语言:	English
出版:	2017
主题:	T Technology (General)
在线阅读:	http://eprints.utm.my/id/eprint/92232/1/JesbainsKaurPMJIIT2017.pdf.pdf
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