PZT driven silicon XY microstage for multiprobe data storage /

PZT driven silicon XY microstage for multiprobe data storage /

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书目详细资料
主要作者:	Mohd Faizul Mohd Sabri
格式:	Thesis 图书
语言:	English
出版:	2009.
主题:	Piezoelectric devices > Materials. Nanotechnology > Materials. Microactuators > Materials. Electromechanical devices. Microelectronics.
标签:	添加标签没有标签, 成为第一个标记此记录!

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